Facilities and Equipment:

The MRC has a sizable equipment base, with capabilities ranging from epitaxial growth to materials characterization to device fabrication. Following is a partial list of MRC equipment:

• Lithography
  • CAD system with multiple data formats
  • Pattern generator
  • Contact mask aligners
  • 3- and 4-inch wafer capability
  • 1,000 ft2 Class 100 clean room
  • Raith e-beam lithography
  • Karl Suss MJB 6 Mask Aligner
• Diffusion furnaces (3-inch and 4-inch wafer capability)
• Metallization
  • Sputtering system 1
  • Sputtering system 2
  • E­beam Evaporation System 1
  • E­beam Evaporation System 2
• Clean Room
• Dielectric films
  • Sputtering systems
  • PECVD System 1
  • PECVD System 2
  • PECVD System 3
  • LPCVD
• Reactive ion etching
  • Dual chamber reactive ion etch (RIE) system with F and Cl etching capability
  • Single chamber Deep RIE for Si MEMS etching
• Surface and thin film analysis
  • Secondary ion mass spectrometry
  • Scanning electron microscope
• MBE laboratory
  • 2 Perkin­Elmer MBE systems, Sb and As sources, and ECR plasmasource for nitrogen
  • vacuum evaporator for metal deposition
  • wet processing for the above
• Microwave laboratory
  • Network analyzers to 100 GHz
  • Anechoic chamber for antenna measurements
  • Wire bonder
  • Network analyzer for lower frequencies
  • Phase noise measurement system
• Optical laboratory
  • Photoluminescence
  • Reflectance/transmission measurements for optoelectronic switches
  • Quantum efficiency measurement system
  • Ocean Optics uv/vis Reflection Measurement
  • Ocean Optics uv/vis Integrated Sphere
  • Varian/Cary Spectrophotometer
• Chemical sensor testing laboratory
  • Gas blending system
  • Network analyzers
• Student fabrication facilities
• Diffusion furnaces with solid dopant sources for 3­inch wafers
• Photoresist spinner and bake ovens
• Mask aligner for low­resolution lithography
• Karl Sues MJB3 mask aligner with deep UV optics for high­resolution lithography
• 3 hearth electron beam evaporator
• HP 4145B semiconductor parameter analyzer
• HP 4280A C meter / C V plotter
• Hall coefficient measurement system
• Filmmetrics film thickness measurement system
• Device and circuit testing
  • Semiconductor parameter analyzers
  • Probe station with micromanipulators
  • Solace simulator
• Device and circuit packaging
  • Bonders
  • Scribe and break system
• Plasma Deposition Laboratory
  • 1 VHF (80 MHz)-plasma CVD reactor for depositing microcrystalline Si materials and devices
  • In-situ growth characterization systems, including Langmuir probes, in-line quadrapole mass-spectrometer and Optical Emission Spectroscopy
• Electronic Material and Device Characterization Laboratory
  • Multi-frequency, multi-temperature C(V) instruments (Agilent 4263, QuadTech, HP 4275) for characterizing amorphous and crystalline materials, oxides/insulators and MOS devices
  • High sensitivity, low noise, multi-temperature Hall set up, capable of measuring nanocrystalline materials
  • DLTS system
  • Quantum efficiency vs. voltage spectroscopy for measuring deep defects and diffusion lengths
  • Photo and dark conductivity apparatus
  • Activation energy set up
  • Environmental stability chamber for lifetime testing of materials and devices
  • High frequency oscilloscopes and probes
  • High resolution, multi-frequency, Renishaw Raman apparatus ( shared with MSE, in Howe Hall)
  • Green laser Raman Spectrometer
• Material Characterization Equipment elsewhere on campus that is accessible to MRC faculty, staff and students:x-ray diffraction:  SEM,TEM, EDS, XPS, Auger, AFM, Surface profilometer
• Organic Electronics Laboratory
  • MBraun 4-section dual glovebox with built-in thermal evaporators and spin coaters.
  • Potentiostat/galvanostat for electrochemistry and AC characterization of devices.
  • Temperature measurement chamber for organic devices.
• Solar cell Testing
  • ABET solar simulator
  • ORIEL solar simulator
  • ELH lamp for J-V measurement
  • Photoconductivity measurement
  • Environmental testing
  • Accelerated light testing for solar cells
  • Solar simulator with neutral density filter
  • Princeton Applied Research Parstatmeter
  • Sinton lifetime measurement
  
  
  

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