Capacities and Equipment
The MRC has a sizable equipment base, with capabilities ranging from epitaxial growth to materials characterization to device fabrication and packaging. The Center also has Micro-Nanotech Students Innovation Lab to foster collaborations and innovations.
Major Microfabrication Tools
Clean Room (1,000 ft2 Class 100) Nano-printing Patterning Etching
Film Deposition Thermal Processing Packaging
