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February 28, 2021

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Iowa State University

Microelectronics Research Center

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Facilities and Equipment

Facilities and Equipment:

The MRC has a sizable equipment base, with capabilities ranging from epitaxial growth to materials characterization to device fabrication. Following is a partial list of MRC equipment:

  • Lithography
    • CAD system with multiple data formats
    • Contact mask aligners
    • 3- and 4-inch wafer capability
    • 1,000 ft2 Class 100 clean room
    • Raith e-beam lithography
    • Karl Suss MJB 6 Mask Aligner
  • Diffusion furnaces (3-inch and 4-inch wafer capability)
  • Metallization
    • Sputtering system 1
    • Sputtering system 2
    • Denton Ebeam System with 6 hearths
    • E­beam Evaporation System 1
    • E­beam Evaporation System 2
  • Thermal Evaporation System
    • Evaporation System 1 (E1)
    • Evaporation System 4 (E4)
    • Evaporation System 6 (E6)
  • Clean Room
  • Sample preperation
    • Rapid Thermal Process
  • Dielectric films
    • Fiji_ALD
    • PECVD System 1
    • PECVD System 2
    • PECVD System 3
    • LPCVD
  • Reactive ion etching
    • Dual chamber reactive ion etch (RIE) system with F and Cl etching capability
    • Single chamber Deep RIE for Si MEMS etching
  • Surface and thin film analysis
    •  Scanning electron microscope
  • MBE laboratory
    • 1 Perkin­ Elmer MBE systems, Sb and As sources, and ECR plasmasource for nitrogen
    • vacuum evaporator for metal deposition
    • wet processing for the above
  • Optical laboratory
    •  Photoluminescence
    • Reflectance/transmission measurements for optoelectronic switches
    • Quantum efficiency measurement system
    • Ocean Optics uv/vis Reflection Measurement
    • Ocean Optics uv/vis Integrated Sphere
    • Varian/Cary Spectrophotometer
  • Chemical sensor testing laboratory
    • Gas blending system
    • Network analyzers
  • Student fabrication facilities
    • Diffusion furnaces with solid dopant sources for 3­inch wafers
    • Photoresist spinner and bake ovens
    • Mask aligner for low­ resolution lithography
    • Karl Suss MJB3 mask aligner with deep UV optics for high­ resolution lithography
    • 6 hearth electron beam evaporator
    • HP 4145B semiconductor parameter analyzer
    • HP 4280A C meter / C V plotter
    • Hall coefficient measurement system
    • Filmmetrics film thickness measurement system
  • Device and circuit testing
    • Semiconductor parameter analyzers
    • Probe station with micromanipulators
    • Solace simulator
  • Device and circuit packaging
    • Bonders
    • Scribe and break system
  • Plasma Deposition Laboratory
    • 1 VHF (80 MHz)-plasma CVD reactor for depositing microcrystalline Si materials and devices
    • In-situ growth characterization systems, including Langmuir probes, in-line quadrapole mass-spectrometer and Optical Emission Spectroscopy
  • Electronic Material and Device Characterization Laboratory
    • Multi-frequency, multi-temperature C(V) instruments (Agilent 4263, QuadTech, HP 4275) for characterizing amorphous and crystalline materials, oxides/insulators and MOS devices
    • High sensitivity, low noise, multi-temperature Hall set up, capable of measuring nanocrystalline materials
    • DLTS system
    • Quantum efficiency vs. voltage spectroscopy for measuring deep defects and diffusion lengths
    • Photo and dark conductivity apparatus
    • Activation energy set up
    • Environmental stability chamber for lifetime testing of materials and devices
    • High frequency oscilloscopes and probes
    • High resolution, multi-frequency, Renishaw Raman apparatus ( shared with MSE, in Howe Hall)
    • Green laser Raman Spectrometer
  • Material Characterization Equipment elsewhere on campus that is accessible to MRC faculty, staff and students:x-ray diffraction:  SEM,TEM, EDS, XPS, Auger, AFM, Surface profilometer
  • Organic Electronics Laboratory
    • MBraun 4-section dual glovebox with built-in thermal evaporators and spin coaters.
    • MBraun 2-section dual glovebox with I-V, dark I-V measurements, C-V and C-F measurements.
    • Potentiostat/galvanostat for electrochemistry and AC characterization of devices.
    • Environmental Chamber
    • Temperature measurement chamber for organic devices.
  • Solar cell Testing
    • ABET solar simulator
    • ORIEL solar simulator
    • ELH lamp for J-V measurement
    • Photoconductivity measurement
    • Environmental testing
    • Accelerated light testing for solar cells
    • Solar simulator with neutral density filter
    • Princeton Applied Research Parstatmeter
    • Sinton lifetime measurement

 

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