Fee Structure

Fee For Service

1. Equipment use hourly rate: We charge an hourly rate for each instrument. See the charge rates in the table below.

2. Basic semester fee: Additionally, there is a basic student user fee of $300 per semester that covers general consumables and  access to basic characterization tools. This includes:

-Lab supplies: tweezers, cleanroom wipes, gloves, glassware.

-Photolithography materials: Photoresist AZ5214, developer, and DI water.

-Basic e-beam evaporation target materials: aluminum, titanium, and nickel.

-Characterization equipment: surface profiler, Filmetrics (thin film thickness measurement), optical microscope, and stereo microscopes.

3. Training Session: The fee for training is approximately $55 per hour, subject to annual adjustments. All training sessions must be conducted by Facility staff before access to the facility and equipment is granted.

4. If you don’t have a student available to work at the MRC and require assistance with material deposition, etching, characterization, or microfabrication experiments, please reach out to Dr. Thoomatti Haridass (“Vignesh”; Email: vignesh@iastate.edu). We will send you a quote that includes estimates of equipment use, staff hours, and delivery time.

Charge rates for MRC equipment ($ per hour) (all prices subject to change)

Instrument 

ISU intramural user rates

 External user rates

Photolithography Mask Aligner (including spin coating)

55

(104/ training)

 200

Nanoscribe 3D Printer 

66

 68

Reactive Ion Etcher 

(Deep RIE, RIE, and oxygen plasma ashing/treatment)

84

 86

Denton E-beam evaporator

72

 76

Temescal E-­beam evaporator

58

 60

Atomic Layer Deposition

58

 60

Raith E-beam Lithography 

58

 60

Varian/Cary UV/VIS Spectrophotometer

55

 56

Filmmetrics

46

  

Profilometer

42

  

Photonic

119

 123