Temescal e-beam Explore has six hearths (crucibles) allowing the evaporation of multiple layers of metals or dielectric thin films. E-beam evaporation is one of the most common types of physical vapor deposition (PVD). In this system, an electron beam vaporizes material that is kept under vacuum (i.e., 10-6 Torr) using cryogenic pump. The thickness of the grown film is recorded by a quartz crystal monitor.
Capabilities and specifications:
- Six hearths allow the evaporation of metals and metal oxides
- Manual evaporation
- The system can hold up to 14 wafers 3″ in diameter
- Available Materials: Al, Cr, Ni, Ag, TiO2, SiO2, Si, Cu, NiOx, Au
- Substrate rotation
Contact: Dr. Moneim Ismail or Dr. Liang Dong