Center Labs
NSF Microfabrication Teaching Lab
Nano Lab
Glovebox Lab
MOCVD Lab
Photolithography Lab
Film Deposition Lab
Dry Etching Lab
Wet Etching Lab
Optical Characterization Lab
Electrical Characterization Lab
Micro-Nanotech Students Innovation Lab
NSF Microfabrication Teaching Lab
- Clean Room (1,000 ft2 Class 100)
- Lithography
- Etching
- High Temperature Processing
- Oxidation and diffusion furnaces
- Annealing Furnaces, Ovens, and Tube furnaces
- Rapid Thermal Process (RTP)
Nano Lab
- Atomic force Microscope (AFM)
- Nanoscribe GT2 3D printer (3D Nanoprinter)
- Raith e-beam lithography (with SEM)
Glovebox Lab
- MBraun glovebox with J-V setup and impedance spectroscopy measurements.
- Solar simulator with a neutral density filter
- MBraun 4-section glovebox
- ABET, ORIEL solar simulator, and ELH lamp for JV testing
- Accelerated light testing for solar cells
- Environmental Chamber for tracking the stability of solar devices
- Ocean Optics UV/Vis Reflection Measurement
- Ocean Optics UV/Vis Integrated Sphere
- Multi-frequency, multi-temperature C(V) instruments (Agilent 4263, QuadTech, HP 4275, Hioki 3536 LCR meter)
MOCVD Lab
- MOCVD epitaxial growth of compound semiconductors
Photolithography Lab
- Karl Suss MJB3 Mask Aligner
- Karl Suss MA6 Mask Aligner
- Karl Suss MJB4 mask aligner
- Spinners 1 & 2
- Tergeo Plasma Cleaner
Film Deposition Lab
- Sputtering systems 1 & 2
- Denton E-beam (for metal materials: Au, Ag, Al, Ti, Ni, Bi, etc.)
- Temescal E-beam (for non-metal materials: oxides, nitrides, etc.)
- Thermal Evaporator E1, E4, & E6
- Fiji ALD
- MBraun 4-section glovebox
- Spinners 1 & 2
- Tergeo Plasma Cleaner
- Cole Parmer 8890 Ultrasonic Cleaner
- Oxidation and diffusion furnaces
Dry Etching Lab
- Karl Suss MJB3 Mask Aligner
- Karl Suss MA6 Mask Aligner
- Karl Suss MJB4 mask aligner
- Reactive Ion Etching (RIE)
- Deep Reactive Ion Etching (Deep-RIE)
Wet Etching Lab
- Wet Etch Bench for
- Acid or Base Etching
- Silicon Oxide Etching
Optical Characterization Lab
- Environmental Chamber for tracking the stability of solar devices
- Green laser Raman Spectrometer
- Ocean Optics UV/Vis Reflection Measurement
- Ocean Optics UV/Vis Integrated Sphere
- Photoluminescence (PL)
- Solar simulator with a neutral density filter
- Varian/Cary Spectrophotometer
Electrical Characterization Lab
- Filmmetrics film thickness measurement
- Surface profilometer
- HP 4145B semiconductor parameter analyzer
- HP 4280A C meter / C V plotter
- Probe station with micromanipulators 1
- Probe station with micromanipulators 2
- Four-point probe measurement
- Impedance spectroscopy instruments (Agilent 4263, QuadTech, HP 4275, Hioki 3536 LCR meter)
- Hall coefficient measurement system
- MBraun glovebox with J-V and impedance spectroscopy measurements.
- Photoconductivity measurement
- Activation energy set up
- Sinton lifetime measurement
Micro-Nanotech Students Innovation Lab
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