Karl Suss MJB4 mask aligner

Coming soon…


Capabilities and specifications:

  • MJB4 can handle 4″ wafers with maximum exposure area of 3″
  • Different wafer chucks and mask holders
  • Different contact modes of exposure (i.e., soft, hard, low-vacuum, and gap exposure)
  • Top side and back side alignments modes


Contact: Dr. Moneim Ismail or Dr. Liang Dong