Fee Structure

1. We charge a low hourly rate for each tool. 

2. $300 per semester (Spring, Fall or Summer) basic charge that covers the following items:

• Commonly used supplies

Tweezers, cleanroom wipes, gloves, glassware. 

• Commonly used materials

Photoresist AZ5214, developer, isopropanol, acetone, and DI water  

Aluminum, chromium, titanium, and nickel e-beam evaporation target material

• Electrical characterization

Probe stations, semiconductor analyzers, four-probe resistance, oscilloscope, function generator, multimeter, LCR meter, and network analyzer.

• Optical characterization

Surface profiler, Filmetrics (thin film thickness measurement), optical microscope, and stereo microscopes

• Basic fabrication and sample preparation

Oxygen plasma treatment, spin coaters, various ovens, hotplates, mixers, analytical balance, wet chemical hoods

• Storage cabinets inside the facility

• Technical advice from our staff for designing microfabrication process and measurement setup

Charge rates for MRC equipment ($ per hour) (all prices subject to change)

Instrument 

ISU intramural user rates

Microfabrication Tools

MJB3 Mask Aligner

27.5

MJB4 Mask Aligner

27.5

MA6 Mask Aligner

27.5

Nanoscribe 3D Printer 

90

Deep Reactive Ion Etcher

70

Reactive Ion Etcher

70

Denton E-beam evaporator

66

Temescal E-­beam evaporator

58

Sputtering

58

Atomic Layer Deposition

58

E-beam Lithography 

58

Rapid Thermal Process

20

Wire Bonder

20

Characterization Tools

Varian/Cary UV/VIS Spectrophotometer

50

Atomic Force Microscope 

20

Raman spectrometer*

20

FTIR spectrometer*

20

Scanning electron microscope (Raith)

40