Fee For Service
1. We charge a low hourly rate for each tool. | |
2. $300 per semester (Spring, Fall or Summer) basic charge that covers the following items: | |
| Tweezers, cleanroom wipes, gloves, glassware. |
| Photoresist AZ5214, developer, isopropanol, acetone, and DI water |
Aluminum, chromium, titanium, and nickel e-beam evaporation target material | |
| Probe stations, semiconductor analyzers, four-probe resistance, oscilloscope, function generator, multimeter, LCR meter, and network analyzer. |
| Surface profiler, Filmetrics (thin film thickness measurement), optical microscope, and stereo microscopes |
| Oxygen plasma treatment, spin coaters, various ovens, hotplates, mixers, analytical balance, wet chemical hoods |
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If you would like to have our staff run your examples, there will be a staff labor charge on top of the rate listed in the table below.
Charge rates for MRC equipment ($ per hour) (all prices subject to change) | |||
Instrument | ISU intramural user rates | ||
Microfabrication Tools | |||
MJB3 Mask Aligner | 27.5 | ||
MJB4 Mask Aligner | 27.5 | ||
MA6 Mask Aligner | 27.5 | ||
Nanoscribe 3D Printer | 90 | ||
Deep Reactive Ion Etcher | 70 | ||
Reactive Ion Etcher | 70 | ||
Denton E-beam evaporator | 66 | ||
Temescal E-beam evaporator | 58 | ||
Sputtering | 58 | ||
Atomic Layer Deposition | 58 | ||
E-beam Lithography | 58 | ||
Rapid Thermal Process | 20 | ||
Wire Bonder | 20 | ||
Characterization Tools | |||
Varian/Cary UV/VIS Spectrophotometer | 50 | ||
Atomic Force Microscope | 20 | ||
Raman spectrometer* | 20 | ||
FTIR spectrometer* | 20 | ||
Scanning electron microscope (Raith) | 40 |
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Training session
Fee for training sessions is $50 per hour. Training sessions must be performed by Facility staff prior to facility and equipment access.