Fee For Service
1. Equipment use hourly rate: We charge an hourly rate for each instrument. See the charge rates in the table below.
2. Basic semester fee: Additionally, there is a basic student user fee of $300 per semester that covers general consumables and access to basic characterization tools. This includes:
-Lab supplies: tweezers, cleanroom wipes, gloves, glassware.
-Photolithography materials: Photoresist AZ5214, developer, and DI water.
-Basic e-beam evaporation target materials: aluminum, titanium, and nickel.
-Characterization equipment: surface profiler, Filmetrics (thin film thickness measurement), optical microscope, and stereo microscopes.
3. Training Session: The fee for training is approximately $55 per hour, subject to annual adjustments. All training sessions must be conducted by Facility staff before access to the facility and equipment is granted.
4. If you don’t have a student available to work at the MRC and require assistance with material deposition, etching, characterization, or microfabrication experiments, please reach out to Dr. Thoomatti Haridass (“Vignesh”; Email: vignesh@iastate.edu). We will send you a quote that includes estimates of equipment use, staff hours, and delivery time.
Charge rates for MRC equipment ($ per hour) (all prices subject to change) | |||
Instrument | ISU intramural user rates | External user rates | |
Photolithography Mask Aligner (including spin coating) | 55 | 200 | |
Nanoscribe 3D Printer | 93 | 95.5 | |
Reactive Ion Etcher (Deep RIE, RIE, and oxygen plasma ashing/treatment) | 81 | 83 | |
Denton E-beam evaporator | 72 | 76 | |
Temescal E-beam evaporator | 58 | 60 | |
Atomic Layer Deposition | 58 | 60 | |
Raith E-beam Lithography | 58 | 60 | |
Varian/Cary UV/VIS Spectrophotometer | 55 | 56 | |
Filmmetrics | 46 | ||
Profilometer | 42 | ||