Fee Structure

Fee For Service

1. Equipment use hourly rate: We charge an hourly rate for each instrument. See the charge rates in the table below.

2. Basic semester fee: Additionally, there is a basic student user fee of $300 per semester that covers general consumables and  access to basic characterization tools. This includes:

-Lab supplies: tweezers, cleanroom wipes, gloves, glassware.

-Photolithography materials: Photoresist AZ5214, developer, and DI water.

-Basic e-beam evaporation target materials: aluminum, titanium, and nickel.

-Characterization equipment: surface profiler, Filmetrics (thin film thickness measurement), optical microscope, and stereo microscopes.

3. Training Session: The fee for training is approximately $55 per hour, subject to annual adjustments. All training sessions must be conducted by Facility staff before access to the facility and equipment is granted.

4. If you don’t have a student available to work at the MRC and require assistance with material deposition, etching, characterization, or microfabrication experiments, please reach out to Dr. Thoomatti Haridass (“Vignesh”; Email: vignesh@iastate.edu). We will send you a quote that includes estimates of equipment use, staff hours, and delivery time.

Charge rates for MRC equipment ($ per hour) (all prices subject to change)

Instrument 

ISU intramural user rates

 External user rates

Photolithography Mask Aligner (including spin coating)

55

 200

Nanoscribe 3D Printer 

93

 95.5

Reactive Ion Etcher 

(Deep RIE, RIE, and oxygen plasma ashing/treatment)

81

 83

Denton E-beam evaporator

72

 76

Temescal E-­beam evaporator

58

 60

Atomic Layer Deposition

58

 60

Raith E-beam Lithography 

58

 60

Varian/Cary UV/VIS Spectrophotometer

55

 56

Filmmetrics

46

  

Profilometer

42