Fee For Service
Charge rates for MRC equipment ($ per hour) (all prices subject to change) | |||
Instrument | ISU intramural user rates | Extramural user rates | |
Photolithography Mask Aligner (including spin coating) | 55 | 200 | |
Nanoscribe 3D Printer | 90 | 100 | |
Reactive Ion Etcher (deep RIE, RIE, and oxygen plasma ashing/treatment) | 70 | 140 | |
Denton E-beam evaporator | 72 | 74 | |
Temescal E-beam evaporator | 58 | 60 | |
Sputtering | 58 | 60 | |
Atomic Layer Deposition | 58 | 60 | |
E-beam Lithography | 58 | 60 | |
Varian/Cary UV/VIS Spectrophotometer | 53 | 60 | |
Training session
Fee for training session is $50 per hour (subject to change every year). Training sessions must be performed by Facility staff prior to facility and equipment access.