Fee Structure

Fee For Service

Charge rates for MRC equipment ($ per hour) (all prices subject to change)

Instrument 

ISU intramural user rates

 Extramural user rates

Photolithography Mask Aligner (including spin coating)

55

  200

Nanoscribe 3D Printer 

90

  100

Reactive Ion Etcher (deep RIE, RIE, and oxygen plasma ashing/treatment)

70

  140

Denton E-beam evaporator

72

  74

Temescal E-­beam evaporator

58

  60

Sputtering

58

  60

Atomic Layer Deposition

58

  60

E-beam Lithography 

58

  60

Varian/Cary UV/VIS Spectrophotometer

53

  60
 

Training session

Fee for training session is $50 per hour (subject to change every year). Training sessions must be performed by Facility staff prior to facility and equipment access.