Fee For Service*
1. We charge a low hourly rate for each tool; and | ||
2. $300 per semester (Spring, Fall or Summer) basic charge that covers the following items: | ||
| Tweezers, cleanroom wipes, gloves, glassware. | |
| Photoresist AZ5214, developer, isopropanol, acetone, and DI water | |
Aluminum, chromium, titanium, and nickel e-beam evaporation target material | ||
| Probe stations, semiconductor analyzers, four-probe resistance, oscilloscope, function generator, multimeter, LCR meter, and network analyzer. | |
| Surface profiler, Filmetrics (thin film thickness measurement), optical microscope, and stereo microscopes | |
| Oxygen plasma treatment, spin coaters, various ovens, hotplates, mixers, analytical balance, wet chemical hoods | |
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Or, if you would like to have our staff run your examples, there will be a staff labor charge on top of the rate listed in the table below.
Charge rates for MRC equipment ($ per hour) – 2022/2023 (all prices subject to change) | |||
Instrument | ISU intramural user rates | External user rates | |
Microfabrication Tools | |||
MJB3 Mask Aligner | 24 | 50 | |
MJB4 Mask Aligner | 24 | 50 | |
MA6 Mask Aligner | 24 | 50 | |
Nanoscribe 3D Printer | 54 | 100 | |
Deep Reactive Ion Etcher | 46 | 100 | |
Reactive Ion Etcher | 46 | 100 | |
Denton E-beam evaporator | 66 | 70 | |
Temescal E-beam evaporator | 58 | 60 | |
Sputtering | 58 | 60 | |
Atomic Layer Deposition | 58 | 100 | |
E-beam Lithography | 67 | 100 | |
Rapid Thermal Process | 20 | 30 | |
Wire Bonder | 15 | 30 | |
Characterization Tools | |||
Varian/Cary UV/VIS Spectrophotometer | 50 | 60 | |
Atomic Force Microscope | 12 | 20 | |
Raman spectrometer* | 10 | 18 | |
FTIR spectrometer* | 10 | 18 | |
Scanning electron microscope (Raith) | 48 | 68 |
Training session: Fee for training sessions is $47 per hour. Training sessions must be performed by Facility staff prior to facility and equipment access.