Fee For Service
1. We charge a low hourly rate for each tool.
2. $300 per semester (Spring, Fall or Summer) basic charge that covers the following items:
Tweezers, cleanroom wipes, gloves, glassware.
Photoresist AZ5214, developer, isopropanol, acetone, and DI water
Aluminum, chromium, titanium, and nickel e-beam evaporation target material
Probe stations, semiconductor analyzers, four-probe resistance, oscilloscope, function generator, multimeter, LCR meter, and network analyzer.
Surface profiler, Filmetrics (thin film thickness measurement), optical microscope, and stereo microscopes
Oxygen plasma treatment, spin coaters, various ovens, hotplates, mixers, analytical balance, wet chemical hoods
If you would like to have our staff run your examples, there will be a staff labor charge on top of the rate listed in the table below.
Charge rates for MRC equipment ($ per hour) (all prices subject to change)
ISU intramural user rates
MJB3 Mask Aligner
MJB4 Mask Aligner
MA6 Mask Aligner
Nanoscribe 3D Printer
Deep Reactive Ion Etcher
Reactive Ion Etcher
Denton E-beam evaporator
Temescal E-beam evaporator
Atomic Layer Deposition
Rapid Thermal Process
Varian/Cary UV/VIS Spectrophotometer
Atomic Force Microscope
Scanning electron microscope (Raith)
Fee for training sessions is $50 per hour. Training sessions must be performed by Facility staff prior to facility and equipment access.