Center Labs
NSF Microfabrication Teaching Lab
Nano Lab
Organic Electronics Lab
MOCVD Lab
Photolithography Lab
Film Deposition Lab
Dry Etching Lab
Wet Etching Lab
Optical Characterization Lab
Electrical Characterization Lab
Micro-Nanotech Students Innovation Lab
NSF Microfabrication Teaching Lab
- Clean Room (1,000 ft2 Class 100)
- Lithography
- Etching
- High Temperature Processing
- Oxidation and diffusion furnaces
- Annealing Furnaces, Ovens, and Tube furnaces
- Rapid Thermal Process (RTP)
Nano Lab
- Atomic force Microscope (AFM)
- Nanoscribe GT2 3D printer (3D Nanoprinter)
- Raith e-beam lithography (with SEM)
Organic Electronics Lab
- MBraun glovebox with J-V setup and impedance spectroscopy measurements.
- Solar simulator with a neutral density filter
- MBraun 4-section glovebox
- ABET, ORIEL solar simulator, and ELH lamp for JV testing
- Accelerated light testing for solar cells
- Environmental Chamber for tracking the stability of solar devices
- Ocean Optics UV/Vis Reflection Measurement
- Ocean Optics UV/Vis Integrated Sphere
- Multi-frequency, multi-temperature C(V) instruments (Agilent 4263, QuadTech, HP 4275, Hioki 3536 LCR meter)
MOCVD Lab
- MOCVD epitaxial growth of compound semiconductors
Photolithography Lab
- Karl Suss MJB3 Mask Aligner
- Karl Suss MA6 Mask Aligner
- Karl Suss MJB4 mask aligner
- Spinners 1 & 2
- Tergeo Plasma Cleaner
Film Deposition Lab
- Sputtering systems 1 & 2
- Denton E-beam
- Temescal E-beam
- Thermal Evaporator E1, E4, & E6
- Fiji ALD
- MBraun 4-section glovebox
- Spinners 1 & 2
- Tergeo Plasma Cleaner
- Cole Parmer 8890 Ultrasonic Cleaner
- Oxidation and diffusion furnaces
Dry Etching Lab
- Karl Suss MJB3 Mask Aligner
- Karl Suss MA6 Mask Aligner
- Karl Suss MJB4 mask aligner
- Reactive Ion Etching (RIE)
- Deep Reactive Ion Etching (Deep-RIE)
Wet Etching Lab
- Wet Etch Bench for
- Acid or Base Etching
- Silicon Oxide Etching
Optical Characterization Lab
- Environmental Chamber for tracking the stability of solar devices
- Green laser Raman Spectrometer
- Ocean Optics UV/Vis Reflection Measurement
- Ocean Optics UV/Vis Integrated Sphere
- Photoluminescence (PL)
- Solar simulator with a neutral density filter
- Varian/Cary Spectrophotometer
Electrical Characterization Lab
- Filmmetrics film thickness measurement
- Surface profilometer
- HP 4145B semiconductor parameter analyzer
- HP 4280A C meter / C V plotter
- Probe station with micromanipulators 1
- Probe station with micromanipulators 2
- Four-point probe measurement
- Impedance spectroscopy instruments (Agilent 4263, QuadTech, HP 4275, Hioki 3536 LCR meter)
- Hall coefficient measurement system
- MBraun glovebox with J-V and impedance spectroscopy measurements.
- Photoconductivity measurement
- Activation energy set up
- Sinton lifetime measurement
Micro-Nanotech Students Innovation Lab
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