Karl Suss MJB3 mask aligner

Karl Süss MJB3 Mask Aligner is capable of performing high resolution photolithography with area up to 3″ in diameter using soft and hard contact vacuum modes.


Capabilities and specifications:

  • Split-field mask alignment using front-side illumination
  • Different modes of exposure (i.e., hard and soft)
  • MJB3 is equipped with 350 Watt mercury arc UV lamp producing 405 nm wavelength


Contact: Dr. Moneim Ismail or Dr. Liang Dong