Karl Süss MJB3 Mask Aligner is capable of performing high resolution photolithography with area up to 3″ in diameter using soft and hard contact vacuum modes.
Capabilities and specifications:
- Split-field mask alignment using front-side illumination
- Different modes of exposure (i.e., hard and soft)
- MJB3 is equipped with 350 Watt mercury arc UV lamp producing 405 nm wavelength
Contact: Dr. Moneim Ismail or Dr. Liang Dong