Denton E-beam

Denton e-beam Explore has six hearths (crucibles) allowing the evaporation of multiple layers of metals or dielectric thin films. E-beam evaporation is one of the most common types of physical vapor deposition (PVD). In this system, an electron beam vaporizes material that is kept under vacuum (i.e., 10-6 Torr) using cryogenic pump.  The thickness of the grown film is recorded by an Inficon crystal monitor.


Capabilities and specifications:

  • Six hearths allow the evaporation of metals and metal oxides
  • Automated and manual evaporation
  • Available Materials: Al, Cr, Ni, Ag, Cu, NiOx, Au
  • Substrate rotation: 0 – 20 rpm


Contact: Dr. Moneim Ismail or Dr. Liang Dong