Equipment-Status

Equipment Status

EquipmentStatusNoteContact:
Atomic force microscopeUp Mo
Atomic Layer Deposition (ALD, Fiji)Up Sam
E-beam evaporator (Denton EXPLORER)DownCryopump pump down!  Mo
E-beam evaporator (Temescal BJD-1800)Up Mo
E-beam lithography (Raith e-line)Down Sam
FILMETRICS Thin Film Analyzer (F20)*Up Mo
Four-probe sheet resistance*Up Mo
Hall effect measurement system**Up  
Karl Suss  Mask Aligner (MJB3)Up Mo
Karl Suss Mask Aligner (MA6)Up Mo
Karl Suss Mask Aligner (MJB4)*Up Mo
MBraun Glovebox – (Characterization line)Up Mo
MBraun Glovebox – (Fabrication line)Up Mo
MOCVD (Agnitron)Up Sam
Nanoscribe 3D Printer (GT2)Up Mo
Etcher (NDR4000, Modes: RIE and Deep RIE)Up Mo
Ocean optics UV-VIS spectrometer**Up Mo
Photoconductivity**Up 
Plasma Cleaner (Tregeo)Up Mo
Probe Station(s)*Up Mo
Rapid Thermal Process (RTP – Solaris 150)Up Sam
Reactive Ion EtcherDownTurbo pump down! Sam
Semiconductor analyzer(s)*Up Mo
Spectrophotometer (Varian – Cary5000 UV/VIS)**Up Mo
Sputtering (Denton, metal)Up Sam
Sputtering (ITO)Up Mo
sputtering (ZnO)Up Sam
Surface profilometer (XP-100)Up Mo
Tube Furnace (Boron)*Up Mo
Tube Furnace (Metal Sintering)*Up Mo
Tube Furnace (Phosphorous)*Up Mo
Tube Furnace (Wet & Dry Oxidation)*Up Mo
Wet Etch Bench – RCA clean*Up Mo
Wire bonderUp Mo

Notes: Equipment belongs to *EE432 or ** EE535 course.