Capacities and Equipment
The MRC has a sizable equipment base, with capabilities ranging from epitaxial growth to materials characterization to device fabrication and packaging. The Center also has Micro-Nanotech Students Innovation Lab to foster collaborations and innovations.
Major Microfabrication Tools
Clean Room (1,000 ft2 Class 100)
Nano-printing
Patterning
- Karl Suss MJB3 Mask Aligner
- Karl Suss MA6 Mask Aligner
- Karl Suss MJB4 mask aligner
- Raith e-beam lithography
- Spinners 1 & 2
- Tergeo Plasma Cleaner
- Cole Parmer 8890 Ultrasonic Cleaner
Etching
Film Deposition
- Sputtering system 1 & 2
- Denton (metal) & Temescal (non-metal) E-beam systems
- Thermal Evaporator E1, E4 & E6
- Fiji Atomic Layer Deposition (ALD) system
- MOCVD
- MBraun 4-section glovebox
Thermal Processing
- Oxidation and diffusion furnaces
- Rapid thermal processing (RTP)
- Annealing furnaces, Ovens
- Various tube furnaces
Packaging
- Wire bonder
- Scribe and break system
Major Testing Tools
- Activation energy set up
- Atomic force Microscope (AFM)
- ABET, ORIEL solar simulator, and ELH lamp for JV testing
- Accelerated light testing for solar cells
- Environmental Chamber for tracking the stability of solar devices
- Four-point probe measurement
- Filmmetrics film thickness measurement
- Green laser Raman Spectrometer
- HP 4145B semiconductor parameter analyzer
- HP 4280A C meter / C V plotter
- Hall coefficient measurement system
- Ocean Optics UV/Vis Reflection Measurement
- Ocean Optics UV/Vis Integrated Sphere
- MBraun glovebox with J-V setup.
- Multi-frequency, multi-temperature C(V) instruments (Agilent 4263, QuadTech, HP 4275, Hioki 3536 LCR meter)
- Photo and dark conductivity apparatus
- Probe station with micromanipulators 1
- Probe station with micromanipulators 2
- Photoluminescence (PL)
- Photoconductivity measurement
- Quantum efficiency vs. voltage spectroscopy
- Renishaw Raman apparatus (shared with MSE, in Howe Hall)
- Solar simulator with a neutral density filter
- Sinton lifetime measurement
- Surface profilometer
- Scanning electron microscope
- Varian/Cary Spectrophotometer
